柱靶磁控溅射镀膜机
- 设备优势:靶材使用周期与利用效率高
- 替代工艺:电镀替代,提高薄膜硬度性能
- 溅射靶材:柱靶、Cr,Al,Ti,Au,Ag...
- 使用技术:磁控溅射
- Target life cycle and utilization efficiency
- High refractive index nitride film to improve film hardness
- Sputtering target: Nb,Si,Cr,Al,Ti,Au,Ag ..
- Technology: Magnetron Sputtering